Date of Award
2026-08-01
Degree Name
Master of Science
Department
Physics
Advisor(s)
Jorge A. Lopez
Abstract
The growing need for resilient semiconductor supply chains has increased the interest in developing local and accessible materials fabrication strategies. Since large-scale semiconductor manufacturing is complex to establish quickly, simpler deposition techniques may provide a practical route to start developing semiconductors materials. Diamond-like carbon (DLC) is a promising candidate in this context because its properties can be tailored through substrate selection and processing parameters.
This thesis establishes an initial framework for the study and fabrication of diamond-like carbon (DLC) materials in the Department of Physics at The University of Texas at El Paso. DLC thin films were deposited by magnetron sputtering on silicon and glass substrates and characterized using Raman spectroscopy, white-light interferometry, X-ray reflectivity, and four-point probe measurements. Raman analysis indicated that amorphous DLC films were successfully produced, with an estimated carbon-cluster size of approximately $1.41~\mathrm{nm}$.
In addition, an old Perkin--Elmer XPS system was adapted into a chemical vapor deposition chamber for the future growth of hydrogenated and doped DLC films.
Language
en
Provenance
Received from ProQuest
Copyright Date
2026-08
File Size
58 p.
File Format
application/pdf
Rights Holder
Balam Arturo Sotelo
Recommended Citation
Sotelo, Balam Arturo, "DLC Thin Films For Semiconductor Applications" (2026). Open Access Theses & Dissertations. 4804.
https://scholarworks.utep.edu/open_etd/4804