Date of Award

2025-12-01

Degree Name

Master of Science

Department

Electrical Engineering

Advisor(s)

David Zubia

Abstract

Deep-level transient spectroscopy (DLTS) remains one of the most widely used techniques for identifying electrically active defects that affect leakage current, carrier lifetime, and overall reliability in semiconductor devices. Legacy boxcar or capacitance meter implementations, however, often struggle with limited signal-to-noise ratio, labor-intensive data collection, and poor adaptability across diverse material systems. This thesis presents the design and optimization of a semi-automated, lock-in-amplifier-based DLTS platform. By pairing a Zurich HF2LI with PID-controlled cryogenic sweeps, precision signal generation, and MATLAB driven acquisition and processing scripts, the system will (i) enhance SNR through phase-sensitive detection, programmable low pass filtering, and parasitics calibration; (ii) capture capacitance transients with continuous, high temporal resolution sampling; and (iii) streamline Arrhenius analyses for rapid and custom extraction of defect energy levels, concentrations, and capture cross-sections. Performance will be benchmarked against a standard Boonton 7200 capacitance meter setup using ion-irradiated silicon photodiodes from Sandia National Laboratories. Beyond experimental advances, defect kinetics and rate window modeling will be integrated to validate extracted parameters and guide measurement protocols. The resulting platform will lower noise floors, shorten experimental cycle times, and establish a flexible foundation for next generation DLTS modalities, positioning UTEP for advanced semiconductor-defect research and future expansions.

Language

en

Provenance

Received from ProQuest

File Size

111 p.

File Format

application/pdf

Rights Holder

Samuel Ruiz

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