Date of Award
2025-08-01
Degree Name
Master of Science
Department
Engineering
Advisor(s)
Brian Schuster
Abstract
Gallium nitride's (GaN) mechanical characterization is essential for evaluating its performance and long-term dependability, especially when subjected to mechanical stress and irradiation. The design and optimization of GaN-based devices, which are extensively employed in high-power electronics and optoelectronics, depend on an understanding of these characteristics. Mechanical characterization allows for the evaluation of key characteristics, including stress distributions, representing the spatial variation of internal stresses under applied loading, and pop-in events, which correspond to abrupt displacements associated with the onset of dislocation nucleation and slip. These features are essential for understanding the anisotropic (direction-dependent) response of the material to external forces and environmental conditions. Additionally, the use of GaN in harsh environments, such as those exposed to radiation, can lead to degradation, which may affect its structural integrity and functionality. Through the examination of load-displacement responses acquired using a spherical indenter, the mechanical characteristics of gallium nitride wafers with c-plane (0001) and m-plane (10-10) orientations are examined in this work. A useful method for assessing important mechanical traits like hardness, elastic modulus, and plastic deformation behavior is spherical indentation, which offers a more even stress distribution than sharp indenters. By utilizing this technique, the research aims to enhance the understanding of orientation-dependent mechanical behavior, emphasizing the variations in elastic and plastic responses that are essential for maximizing performance in a range of applications, particularly those where directional properties are significant.
Language
en
Provenance
Received from ProQuest
Copyright Date
2025-08
File Size
73 p.
File Format
application/pdf
Rights Holder
Daniela Alejandra Duarte
Recommended Citation
Duarte, Daniela Alejandra, "Mechanical Characterization of M Plane (10-10) and C Plane (0001) Gallium Nitride Semiconductors via Spherical Nanoindentation" (2025). Open Access Theses & Dissertations. 4359.
https://scholarworks.utep.edu/open_etd/4359