AES-XPS study of a-carbon:nitrogen thin film deposited by laser ablation

Carlos Oswaldo Martinez Perez, University of Texas at El Paso


AES, XPS and SIMS surface analysis techniques were used in the study of the amorphous carbon nitride thin films (a-C:N) deposited by laser ablation to obtain information about how the incorporation of nitrogen into the amorphous carbon thin films affects its structure and the possibility of finding sp 3 bonds by examining shifts in the binding energies of photoelectrons in XPS. The hardness of a carbon film depends on the concentration of the sp 3 bonds in its structure, while the optical properties are associated with the quantity of sp2 bonds. Thin films of a-C can have similar characteristics to those of diamond, the reason why they can have high hardness, resistance to wearing down, low coefficient of friction, and be chemically inert, as well as high optical transparency. Due to these characteristics thin films of a-C have high potential as protective coatings for microelectronic devices such as magnetic data storage media and heads. Our surface analysis will show in some detail the changes in the structure of such thin films and the presence of sp3 bonds in the depth profile of the samples. This investigation will help the Plasma by Microwave and Laser Ablation Laboratory of the ININ group in Mexico to improve the performance of their thin films, and will solve some of the problems encountered in their fabrication

Subject Area


Recommended Citation

Martinez Perez, Carlos Oswaldo, "AES-XPS study of a-carbon:nitrogen thin film deposited by laser ablation" (2006). ETD Collection for University of Texas, El Paso. AAI1439494.